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ULTRA-HIGH PRECISION METROLOGY OF 3D SURFACES - TWO TECHNOLOGIES COMPARED.

Wavelength Scanning Interferometer accuracy assessed with 3D coordinate measuring machine.

By designing and developing an interferometer with integrated environmental compensation, IBS Precision Engineering and the University of Huddersfield have developed an ultra-high-precision metrology tool that is suitably robust for application within a production environment. To show the accuracy of the Wavelength Scanning Interferometry (WSI) technology developed, measurement results have been compared with those of a 3D coordinate measuring machine having a traceable measurement uncertainty proven to within 11 nm.

The complete article has been published in the April 2014 edition of Mikroniek magazine published by the Dutch Society for Precision Engineering.

 

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